Pre – Aligners
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Pre - Aligners
Various high quality pre-aligners
YASKAWA offers high accuracy pre-aligners for different sized wafers, controlled by the same controller as the robot.
Wafer Size |
100mm-200mm |
200-300mm |
200mm |
300mm |
Gripping Method |
|
Manual |
|
Vacuum grip |
|
Automatic |
|
Edge Grip |

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