Pre Aligners
Various high quality pre-aligners
YASKAWA offers high accuracy pre-aligners for different sized wafers, controlled by the same controller as the robot.
|
Wafer Size |
200mm |
200-300mm |
300mm |
|
Gripping Method |
Vacuum Grip |
Vacuum Grip |
Vacuum/Edge Grip |
| Size Control Method |
N/A |
Manual/Automatic |
N/A |
