Pre Aligners
Various high quality pre-aligners
YASKAWA offers high accuracy pre-aligners for different sized wafers, controlled by the same controller as the robot.
|
Wafer Size |
100mm-200mm |
200-300mm |
200mm |
300mm |
|
Gripping Method |
|
Manual |
|
Vacuum grip |
|
|
Automatic |
|
Edge Grip |
