Load Ports

YASKAWA offers its customers complete solutions which include TDK’s load ports.

This allows us to provide our customers with the highest degree of cleanness,  microscopic particles are reduced to the absolute minimum. 

TDK load ports are designed to keep a unit thoroughly clean since the wiring and piping don’t contact the equipment while operating. 

In addition, TDK’s offers unique precision control air flow with high compatibility. 

Designed for easy maintenance, quick customization to any semiconductor production line.