Semistar Series Wafer Handling Robots
Semistar series wafer handling robots for the semiconductor industry provide high throughput and accuracy
YASKAWA’s semistar series robots for wafer handling include:
| M101 | M201V | M112 | M122 |
| Atmospheric | Atmospheric | Atmospheric | Atmospheric |
| Single arm | Dual arm | Single arm | Single arm |
| Edge / Vacuum grip | Edge / Vacuum grip | Edge / Vacuum grip | Edge / Vacuum grip |
| Traverse axis for high speed transfer | Traverse axis for high speed transfer | ||
| Stationary on track | Stationary on track |
